| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding device in which the positional shift of a workpiece due to rotation of a holding table is suppressed and the position of the workpiece can be precisely detected. <P>SOLUTION: The holding table 8a in the detection means of the grinding device includes: a base part 8g having a suction port 8l in the center of the upper surface thereof; an annular member 8h disposed on the base part 8g to surround the suction port 8l; and a central member 8i disposed at the inside of the circular member 8h on the base part 8g. The annular member 8h has non-air permeability, and has elasticity and has a thickness enough to absorb ruggedness of a protective tape stuck to the surface of the workpiece W. The central member 8i has air permeability and elasticity. <P>COPYRIGHT: (C)2012,JPO&INPIT |
