发明名称 |
Method of Forming Metal Oxide Hardmask |
摘要 |
A method of forming a metal oxide hardmask on a template includes: providing a template constituted by a photoresist or amorphous carbon formed on a substrate; and depositing by atomic layer deposition (ALD) a metal oxide hardmask on the template constituted by a material having a formula SixM(1-x)Oy wherein M represents at least one metal element, x is less than one including zero, and y is approximately two or a stoichiometrically-determined number. |
申请公布号 |
US2012164846(A1) |
申请公布日期 |
2012.06.28 |
申请号 |
US201113333420 |
申请日期 |
2011.12.21 |
申请人 |
HA JEONGSEOK;FUKUDA HIDEAKI;KAIDO SHINTARO;ASM JAPAN K.K. |
发明人 |
HA JEONGSEOK;FUKUDA HIDEAKI;KAIDO SHINTARO |
分类号 |
H01L21/316 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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