发明名称 TRASFERRING UNIT FOR SCRIBING APPARATUS, CUTTING APPARATUS HAVING THE SAME AND METHOD OF CUTTING SUBSTRATE USING THE SAME
摘要 <p>PURPOSE: A transfer unit for cutting device is provided to improve breaking efficiency and productivity by receiving an object to be cut and performing breaking process at the same time. CONSTITUTION: A transfer unit(420) for cutting device comprises: unit body(421); at least two receiving units(422,423,424,425) which receives a specific part from the object and transfers. The receiving unit an adsorption unit(422a,423a,424a,425a) for vacuum adsorption and pressurizing unit(422b,423b,424b,425b) which pressurizes in an opposite direction with the adsorption direction.</p>
申请公布号 KR101160166(B1) 申请公布日期 2012.06.28
申请号 KR20080109461 申请日期 2008.11.05
申请人 发明人
分类号 C03B33/02;G02F1/13;H01L21/302;H01L21/78 主分类号 C03B33/02
代理机构 代理人
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