| 摘要 |
<P>PROBLEM TO BE SOLVED: To derive a target effective light source quickly with low computational cost. <P>SOLUTION: The calculation method of an effective light source which is executed by a computer according to a program includes an acquisition step for acquiring a mathematical model which represents the distribution of amplitude transmittance of an object and the distribution of the phase of light transmitted through the object, an establishment step for establishing an arithmetic expression which calculates the optical intensity on an image plane from the mutual intensity on an object plane which is in relation of Fourier transformation with the effective light source and the mathematical model, and a step for determining the mutual intensity on the object surface so that the distribution of optical intensity on the image plane approaches a target pattern. <P>COPYRIGHT: (C)2012,JPO&INPIT |
