| 摘要 |
<P>PROBLEM TO BE SOLVED: To inspect whether or not an extraction part fulfills a function to extract a second electrode to one face of a piezoelectric layer. <P>SOLUTION: Through holes 37, 38a, 38b are formed on green sheets serving as the piezoelectric layers 40, 41. Next, common electrodes 44, 45 are formed on one faces of the green sheets serving as the piezoelectric layers 40, 41. Then, three green sheets are laminated and burned. Subsequently, filler 65, 66 is filled into the through holes 37, 38 from the upper face of the first piezoelectric layer 40, so as to form the extraction parts 68, 69. Then, continuity of the filler 65, 66 within the through holes 37, 38 is inspected, to determine failure of a piezoelectric actuator 32. Extraction electrodes 46, 47 interconnecting an individual electrode 43 and the plurality of extraction parts 68, 69, respectively are formed on the upper face of the first piezoelectric layer 40 of which failure is not determined. <P>COPYRIGHT: (C)2012,JPO&INPIT |
