| 摘要 |
PURPOSE: A method for inspecting a feature object is provided to accurately obtain conversion relation between reference data and measurement data by additionally setting a feature object. CONSTITUTION: A plurality of measurement regions are set on a substrate(S110). A target measurement region is set for inspecting an object(S120). The reference data and the measurement data of the measurement region near the target measurement region are obtained(S130). One or more feature objects are extracted in the adjacent measurement region(S140). A distortion amount is obtained by comparing the measurement data with the reference data corresponding to the feature object(S150). An inspection region is set in the target measurement region by compensating for the distortion amount(S160).
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