| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tester and a test apparatus including the same capable of performing one-touch testing on a wafer. <P>SOLUTION: A tester and a test apparatus including the tester include a testing interface with a freely rotatable structure, and thereby can perform one-touch testing on a wafer without wafer indexing. The test apparatus includes the tester having: a test head 100 with a rotating ZIF ring 130; and a testing body which is electrically connected to the test head 100 and transmits signals used for testing a number of semiconductor devices in the wafer to the test head 100. The test apparatus further includes a probe card having: a ring-shaped connector part 132 connecting with the ZIF ring 130; and a needle block 320 disposed in its center part and provided with a number of probes for testing the semiconductor devices thereon. The test equipment further includes a wafer support chuck on which the wafer to be tested is placed and held. <P>COPYRIGHT: (C)2012,JPO&INPIT |
