发明名称 |
SURFACE POSITION DETECTION APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD |
摘要 |
A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces
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申请公布号 |
US2012162623(A1) |
申请公布日期 |
2012.06.28 |
申请号 |
US201213405524 |
申请日期 |
2012.02.27 |
申请人 |
HIDAKA YASUHIRO;NAGAYAMA TADASHI;NIKON CORPORATION |
发明人 |
HIDAKA YASUHIRO;NAGAYAMA TADASHI |
分类号 |
G03B27/34;G01B11/14;G01J4/00;G03B27/58;H05K3/00 |
主分类号 |
G03B27/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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