发明名称 |
REPLICATION OF PATTERNED THIN-FILM STRUCTURES FOR USE IN PLASMONICS AND METAMATERIALS |
摘要 |
The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.
|
申请公布号 |
US2012161600(A1) |
申请公布日期 |
2012.06.28 |
申请号 |
US200913131197 |
申请日期 |
2009.11.24 |
申请人 |
NORRIS DAVID J.;HAN SANG EON;BHAN ADITYA;NAGPAL PRASHANT;LINDQUIST NATHAN CHARLES;OH SANG-HYUN |
发明人 |
NORRIS DAVID J.;HAN SANG EON;BHAN ADITYA;NAGPAL PRASHANT;LINDQUIST NATHAN CHARLES;OH SANG-HYUN |
分类号 |
H01J61/52;B05D3/06;B05D5/06;B32B38/10 |
主分类号 |
H01J61/52 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|