发明名称 |
RETAINING DEVICE FOR SUBSTRATES AND METHOD FOR COATING A SUBSTRATE |
摘要 |
The invention relates to a retaining device for substrates to be coated, which device comprises a contact surface for the substrate to be coated. The retaining device is for example configured as a plate on which the substrate rests and which has one or more apertures, e.g. drilled holes, grooves etc. has, through which a pressure gradient can be set between the face of the substrate and the opposite face of the retaining device. In this way a temporary fixing of the substrate by suction onto the retaining device is possible. The invention also relates to a method for coating a substrate which uses the retaining device according to the invention. |
申请公布号 |
WO2012084187(A1) |
申请公布日期 |
2012.06.28 |
申请号 |
WO2011EP06419 |
申请日期 |
2011.12.19 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;REBER, STEFAN;SCHILLINGER, NORBERT;ARNOLD, MARTIN;POCZA, DAVID |
发明人 |
REBER, STEFAN;SCHILLINGER, NORBERT;ARNOLD, MARTIN;POCZA, DAVID |
分类号 |
C23C14/50;B25J15/06;C23C16/458;H01L21/683 |
主分类号 |
C23C14/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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