发明名称 RETAINING DEVICE FOR SUBSTRATES AND METHOD FOR COATING A SUBSTRATE
摘要 The invention relates to a retaining device for substrates to be coated, which device comprises a contact surface for the substrate to be coated. The retaining device is for example configured as a plate on which the substrate rests and which has one or more apertures, e.g. drilled holes, grooves etc. has, through which a pressure gradient can be set between the face of the substrate and the opposite face of the retaining device. In this way a temporary fixing of the substrate by suction onto the retaining device is possible. The invention also relates to a method for coating a substrate which uses the retaining device according to the invention.
申请公布号 WO2012084187(A1) 申请公布日期 2012.06.28
申请号 WO2011EP06419 申请日期 2011.12.19
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;REBER, STEFAN;SCHILLINGER, NORBERT;ARNOLD, MARTIN;POCZA, DAVID 发明人 REBER, STEFAN;SCHILLINGER, NORBERT;ARNOLD, MARTIN;POCZA, DAVID
分类号 C23C14/50;B25J15/06;C23C16/458;H01L21/683 主分类号 C23C14/50
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