发明名称 VAPORIZER
摘要 <p>Provided is a vaporizer to which it is possible to supply raw material, whereby ripples, particles, and the amount of carbon in a film may be reduced, and a film having a desired composition may be formed. Also obtained is a vaporizer with which it is possible to carry out sufficient vaporization without requiring greater heating than necessary, and to simplify temperature management. A vaporizer comprises: a vaporizer main body (3) in which a carrier gas, wherein a liquid material for forming a film is dispersed, is introduced; and a heater main body (4) which is positioned in the interior of the vaporizer main body (3). The shape of the introduction part of the heater main body is a conical shape.</p>
申请公布号 WO2012086728(A1) 申请公布日期 2012.06.28
申请号 WO2011JP79727 申请日期 2011.12.21
申请人 KABUSHIKI KAISHA WATANABE SHOKO;KUSUHARA, MASAKI;UMEDA, MASARU;FUKAGAWA, MITSURU;TODA MASAYUKI 发明人 KUSUHARA, MASAKI;UMEDA, MASARU;FUKAGAWA, MITSURU;TODA MASAYUKI
分类号 H01L21/31;C23C16/448 主分类号 H01L21/31
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