摘要 |
<p>Provided is a vaporizer to which it is possible to supply raw material, whereby ripples, particles, and the amount of carbon in a film may be reduced, and a film having a desired composition may be formed. Also obtained is a vaporizer with which it is possible to carry out sufficient vaporization without requiring greater heating than necessary, and to simplify temperature management. A vaporizer comprises: a vaporizer main body (3) in which a carrier gas, wherein a liquid material for forming a film is dispersed, is introduced; and a heater main body (4) which is positioned in the interior of the vaporizer main body (3). The shape of the introduction part of the heater main body is a conical shape.</p> |
申请人 |
KABUSHIKI KAISHA WATANABE SHOKO;KUSUHARA, MASAKI;UMEDA, MASARU;FUKAGAWA, MITSURU;TODA MASAYUKI |
发明人 |
KUSUHARA, MASAKI;UMEDA, MASARU;FUKAGAWA, MITSURU;TODA MASAYUKI |