| 摘要 |
<p>The micro-reflectron has a potential gradient applying unit e.g. resistive layer (5400), for applying potential gradient in a substrate volume forming a flight zone of ions e.g. tube (3300), where the micro-reflectron has thickness less than 5 mm and other dimensions less than 10 times of the thickness. The unit comprises a wall made of resistive material, and is polarized between metallic polarization electrodes (5210) to generate a continuous potential gradient while providing reflectron function. The zone, the electrodes and the wall are obtained by microelectromechanical system technology. Independent claims are also included for the following: (1) a mass spectrometer (2) a fabrication method for a micro-reflectron.</p> |
