METHOD OF UPDATING CALIBRATION DATA AND A DEVICE MANUFACTURING METHOD

摘要

PURPOSE: A method for updating correction data and a device manufacturing method are provided to improve the accuracy of correction by simultaneously measuring a location through a first location detecting system and a second location detecting system. CONSTITUTION: A first location detecting system includes a target(100) and a sensor. The target or the sensor is mounted on an object. Correction data includes a coefficient which connects the actual location of the object to an apparent measurement location of the object. The actual location of the object is determined from the apparent measurement location of the object by using the coefficient.