| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprinting method and an imprinting device attaining stable imprinted transcription of high definition. <P>SOLUTION: In the supply step, a resin material 5 is supplied to at least one of a surface 1a having a rugged structure region 1A of a mold 1 and a filling base material 11, in the filling step, the resin material 5 is filled between the surface 1a of the mold 1 and the filling base material 11, in the separating step, the filling base material 11 is separated from the mold 1 so as to remain the resin material 5 on the mold 1 side, in the pushing step, an imprinting substrate 7 is brought into contact with the resin material 5, in the mold-releasing step, the mold 1 is pulled apart from the resin material 5, so as to establish a relation θk<θm<θj among the contact angle θm of the resin material 5 to the mold 1, the contact angle θj of the resin material 5 to the filling base material 11, and the contact angle θk of the resin material 5 to the imprinting substrate 7. <P>COPYRIGHT: (C)2012,JPO&INPIT |
