| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electroforming mold which is produced according to a photolithography method, has a step and is excellent in fineness and aspect ratio, and to provide a method of producing the electroforming mold. <P>SOLUTION: The electroforming mold 23 includes: a glass substrate 5 which transmits the ultraviolet rays; a conductive film 6 formed on one surface of the substrate; a first metal film 9 having light-shielding property; a cured photoresist layer 22 assuming an external shape; and a second metal film 15 having a third pattern formed on a stepped part. The electric conduction is applied by the conductive film 6, the first metal film 9 and the second metal film 15 upon electroforming. <P>COPYRIGHT: (C)2012,JPO&INPIT |
