| 发明名称 |
MIRROR DEVICE, MIRROR ARRAY, OPTICAL SWITCH, MIRROR DEVICE MANUFACTURING METHOD, AND MIRROR SUBSTRATE MANUFACTURING METHOD |
| 摘要 |
A mirror device includes a mirror (153) which is supported to be pivotable with respect to a mirror substrate (151), a driving electrode (103-1-103-4) which is formed on an electrode substrate (101) facing the mirror substrate, and an antistatic structure (106) which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure. |
| 申请公布号 |
US2012162735(A1) |
申请公布日期 |
2012.06.28 |
| 申请号 |
US201213412504 |
申请日期 |
2012.03.05 |
| 申请人 |
UCHIYAMA SHINGO;UCHIYAMA SHINGO;YAMAGUCHI JOHJI;SATO MAKOTO;SASAKURA KUNIHIKO;MORITA HIROFUMI;INAGAKI SHUICHIRO;MACHIDA KATSUYUKI;ISHII HIROMU;MURAKAMI MAKOTO |
发明人 |
UCHIYAMA SHINGO;UCHIYAMA SHINGO;YAMAGUCHI JOHJI;SATO MAKOTO;SASAKURA KUNIHIKO;MORITA HIROFUMI;INAGAKI SHUICHIRO;MACHIDA KATSUYUKI;ISHII HIROMU;MURAKAMI MAKOTO |
| 分类号 |
G02B26/08 |
主分类号 |
G02B26/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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