发明名称 ACTUATOR FOR MOVING A MICRO MECHANICAL ELEMENT
摘要 The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror (1), the element being mechanically coupled to a frame (4) with a bendable coupling (2A), wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.
申请公布号 US2012162664(A1) 申请公布日期 2012.06.28
申请号 US201013394209 申请日期 2010.09.16
申请人 BAKKE THOR;JOHANSEN IB-RUNE;VOGL ANDREAS;TYHOLDT FRODE;WANG DAG THORSTEIN;SINTEF 发明人 BAKKE THOR;JOHANSEN IB-RUNE;VOGL ANDREAS;TYHOLDT FRODE;WANG DAG THORSTEIN
分类号 G01B9/02;G02B7/198;H02N2/04 主分类号 G01B9/02
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