发明名称 |
ACTUATOR FOR MOVING A MICRO MECHANICAL ELEMENT |
摘要 |
The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror (1), the element being mechanically coupled to a frame (4) with a bendable coupling (2A), wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator. |
申请公布号 |
US2012162664(A1) |
申请公布日期 |
2012.06.28 |
申请号 |
US201013394209 |
申请日期 |
2010.09.16 |
申请人 |
BAKKE THOR;JOHANSEN IB-RUNE;VOGL ANDREAS;TYHOLDT FRODE;WANG DAG THORSTEIN;SINTEF |
发明人 |
BAKKE THOR;JOHANSEN IB-RUNE;VOGL ANDREAS;TYHOLDT FRODE;WANG DAG THORSTEIN |
分类号 |
G01B9/02;G02B7/198;H02N2/04 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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