发明名称 TEST HANDLER AND METHOD FOR TESTING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A test handler and a semiconductor device test method are provided to reduce the time for regulating the temperatures of semiconductor devices during a test of the semiconductor devices. CONSTITUTION: A test handler(1) comprises a chamber unit for testing semiconductor devices received in a test tray(T). The chamber unit comprises a test chamber(21) having a high fix board(H). A first contact unit(3) connects the semiconductor devices received in the test tray to the high fix board. A first temperature control unit(4) selectively provides first heating liquid and first cooling liquid to the semiconductor devices in contact with the first contact unit.
申请公布号 KR20120069471(A) 申请公布日期 2012.06.28
申请号 KR20100131028 申请日期 2010.12.20
申请人 MIRAE CORPORATION 发明人 KIM, JONG HYUN;LEE, JONG CHAN;LEE, EUNG YONG;PARK, HAE JUN
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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