发明名称 |
TEST HANDLER AND METHOD FOR TESTING SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE: A test handler and a semiconductor device test method are provided to reduce the time for regulating the temperatures of semiconductor devices during a test of the semiconductor devices. CONSTITUTION: A test handler(1) comprises a chamber unit for testing semiconductor devices received in a test tray(T). The chamber unit comprises a test chamber(21) having a high fix board(H). A first contact unit(3) connects the semiconductor devices received in the test tray to the high fix board. A first temperature control unit(4) selectively provides first heating liquid and first cooling liquid to the semiconductor devices in contact with the first contact unit.
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申请公布号 |
KR20120069471(A) |
申请公布日期 |
2012.06.28 |
申请号 |
KR20100131028 |
申请日期 |
2010.12.20 |
申请人 |
MIRAE CORPORATION |
发明人 |
KIM, JONG HYUN;LEE, JONG CHAN;LEE, EUNG YONG;PARK, HAE JUN |
分类号 |
G01R31/26;H01L21/66 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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