| 摘要 |
<p>Provided is an organic EL device manufacturing method including a vapor deposition step of supplying a substrate, and while moving the substrate with a non-electrode-layer side thereof in contact with a surface of a can roller, the non-electrode-layer side being provided with no electrode layer, discharging an evaporated organic layer forming material from a nozzle of a vapor deposition source to form an organic layer on an electrode-layer side of the substrate, the electrode-layer side being provided with an electrode layer, wherein the vapor deposition step includes: supplying a shadow mask including an opening portion so as to interpose the shadow mask between the substrate held in contact with the can roller, and the nozzle; and forming the organic layer corresponding to the opening portion on the electrode-layer side of the substrate, while moving the substrate and the shadow mask with through holes included at each of the substrate and the shadow mask engaged with projections included in the can roller.</p> |
