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发明名称
SPUTTERING TARGET AND METHOD FOR FINISHING SURFACE OF SUCH TARGET
摘要
申请公布号
EP1666630(A4)
申请公布日期
2012.06.27
申请号
EP20040772044
申请日期
2004.08.24
申请人
JX NIPPON MINING & METALS CORPORATION
发明人
TSUKAMOTO, S.
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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