SUBSTRATE FOR MOUNTING SEMICONDUCTOR DEVICES

摘要

PURPOSE: A substrate for mounting a semiconductor device is provided to prevent the deformation of a substrate by controlling the intensity of an electric field applied to an electroactive polymer layer. CONSTITUTION: A substrate for mounting a semiconductor device includes a substrate(100) and substrate deformation control structures(200a, 200b). First electrode layers(210a, 210b) are formed on the substrate. Electroactive polymer layers(220a, 220b) are transformed when an electric field is applied to while being formed on the top of the first electrode layer. Second electrode layers(230a, 230b) are formed on the top of the electroactive polymer layer. The first and the second electrode layers include one or more of metal and conductive polymer.