Dislocation engineering in single crystal synthetic diamond material

摘要

A single crystal chemical vapour deposition (CVD) synthetic diamond layer comprises a non-parallel dislocation array, wherein the non-parallel dislocation array comprises a plurality of dislocations forming an array of inter-crossing dislocations, as viewed in an X-ray topographic cross-sectional view or under luminescent conditions. The diamond layer may have a thickness greater than 1 µm, a density of dislocations in the range of 10 â 1x108 cm-2 and a birefringence equal to or less than 5x10-4. The diamond layer may be a {110} or {113} oriented layer. A method of manufacturing the single crystal diamond material is also disclosed.