摘要 |
PURPOSE: An apparatus for growing a single crystal ingot is provided to prevent heat from a crucible from being delivered to the end part of a water cooling tube by including a heat insulator which is arranged to surround around the end part of the water cooling tube. CONSTITUTION: A chamber(110) has an accommodation space inside. A crucible(120) is arranged in the chamber and accepts a silicon solution. A heating element(130) is arranged around the crucible and heats the crucible. A water cooling tube(140) cools an ingot which is grown up from the silicon solution. A heat insulator(150) blocks the heat from the crucible not to be delivered to the end part of the water cooling tube. |