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发明名称
Method and structure for forming high-performance fets with embedded stressors
摘要
申请公布号
GB2486839(A)
申请公布日期
2012.06.27
申请号
GB20120004634
申请日期
2010.09.08
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
KANGGUO CHENG;ALI KHAKIFIROOZ;BRUCE DORIS;GHAVAM G SHAHIDI
分类号
H01L29/78;H01L21/336
主分类号
H01L29/78
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代理人
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