发明名称 MULTILAYER PIEZOELECTRIC ACTUATOR
摘要 <p>Provided is a multilayer piezoelectric actuator in which a split is not likely to occur in part of an external electrode due to stress and that is not likely to be damaged due to the progression of a crack even in the case where such a split occurs, and that is excellent in terms of reliability. External electrodes 9 are formed on external surfaces of a multilayer piezoelectric body 2 in which a plurality of internal electrodes and a plurality of piezoelectric layers are stacked on top of one another and each of the external electrodes 9 includes a base electrode 10 and a stress-absorbing electrode member 11 formed on the base electrode. The stress-absorbing electrode member 11 includes an elastic structure 11a that elastically deforms when subject to an external force and fixed portions 11b and 11c that are fixed to the base electrode 10. The fixed portions 11b and 11c have a shape that extends parallel to edge portions 6a to 8a of internal electrodes 6 to 8 and each of the fixed portions 11b to 11g has a width dimension that does not reach an adjacent internal electrode in the stacking direction.</p>
申请公布号 EP2259353(B1) 申请公布日期 2012.06.27
申请号 EP20090734566 申请日期 2009.04.15
申请人 MURATA MANUFACTURING CO. LTD. 发明人 KASAI, SHIGEHARU;SHINDO, SATOSHI;HAYASHI, KOICHI;MORIMOTO, YASUHIRO
分类号 H01L41/047;H01L41/083 主分类号 H01L41/047
代理机构 代理人
主权项
地址