,申请号JP20070327224-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JP4960851(B2)	申请公布日期	2012.06.27
申请号	JP20070327224	申请日期	2007.12.19
申请人		发明人
分类号	C23C14/35;H01L21/285	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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