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发明名称
THIN FILM SEMICONDUCTOR DEVICE FABRICATION METHOD AND THIN FILM SEMICONDUCTOR DEVICE
摘要
申请公布号
EP2110856(A4)
申请公布日期
2012.06.27
申请号
EP20080710726
申请日期
2008.01.28
申请人
SONY CORPORATION;RIKEN
发明人
NOMOTO, KAZUMASA;HIRAI, NOBUKAZU;YASUDA, RYOICHI;YAGI, IWAO;MINARI, TAKEO;TSUKAGOSHI, KAZUHITO;AOYAGI, YOSHINOBU
分类号
H01L29/786;H01L21/336;H01L51/05
主分类号
H01L29/786
代理机构
代理人
主权项
地址
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