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发明名称
Projection optical system
摘要
申请公布号
EP2040123(B1)
申请公布日期
2012.06.27
申请号
EP20090000246
申请日期
2004.11.25
申请人
CARL ZEISS SMT GMBH
发明人
ROSTALSKI, HANS-JUERGEN;DODOC, AURELIAN;ULRICH, WILHELM;EPPLE, ALEXANDER
分类号
G03F7/20;G02B13/14
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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