摘要 |
A vacuum pump (100) comprises a pumping mechanism having an annular pumping chamber (112, 114, 116) extending about a longitudinal axis (107) and through which fluid is pumped by the pumping mechanism. A plenum (126) located remote from the pumping mechanism has an inlet (128) for receiving fluid to be pumped by the pumping mechanism and a plurality of outlets (132) arranged about the longitudinal axis (107) for supplying fluid to the annular chamber. |