TRAY, TRAY SUPPORT MEMBER, AND VACUUM PROCESSING APPARATUS

摘要

PURPOSE: A tray, a tray support member, and a vacuum processing apparatus are provided to control the change of a tray position due to a chuck by preventing a tray from being twisted. CONSTITUTION: A chuck maintains a tray(50). The chuck includes a vertically movable frame(46) and an arm(47). The arm is extended from the frame toward the tray and supports the tray. The arm includes a supporting portion contacting the tray and a counter bore portion. The counter bore portion is formed on a side of the supporting portion facing the frame.