发明名称 |
Process for preparing stable photoresist compositions |
摘要 |
A composition of matter consisting of a stable solution containing a polymer derived from a solution of a polymer containing trace metals, the derived method comprising the steps of: (a) providing a polymer solution containing a polymer, a first solvent and trace metals; (b) passing said polymer solution through an acidic cation ion exchange material to remove said trace metals therefrom and thereby forming a polymer solution containing free acid radicals; (c) precipitating said polymer from said polymer solution of step b by contacting with a second solvent wherein the polymer is substantially insoluble therein; (d) filtering said solution and said second solvent to thereby form a solid polymer cake; and (e) contacting said cake from step d with sufficient quantities of additional said second solvent in order to remove free acid radicals there from. |
申请公布号 |
US8207278(B2) |
申请公布日期 |
2012.06.26 |
申请号 |
US20100928331 |
申请日期 |
2010.12.09 |
申请人 |
RUSSELL WILLIAM RICHARD;SCHULTZ JOHN ANTHONY;DUPONT ELECTRONIC POLYMERS LP |
发明人 |
RUSSELL WILLIAM RICHARD;SCHULTZ JOHN ANTHONY |
分类号 |
C08G59/16;C08G59/17 |
主分类号 |
C08G59/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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