| 摘要 |
An apparatus for optically checking magnetic disk defects that makes possible more accurate determination of positions of minute defects by illuminating an area greater than a checkup area with an illuminating beam having a Gaussian distribution is to be provided. The apparatus is configured of a specular reflection detecting device including a detector having a detecting face including an array of multiple pixels, and a processing device that figures out the position of each defect by using, in addition to the output signal from each of the pixels of the detector that detected a specular reflection from the checkup area, also output signals of some pixels out of the multiple pixels having detected the specular reflection from the checkup area of one turn before and the checkup area of one turn after, both adjoining in the radial direction, and determines the type of the defect. |
