发明名称 |
Scanning probe microscope capable of measuring samples having overhang structure |
摘要 |
A scanning probe microscope tilts the scanning direction of a z-scanner by a precise amount and with high repeatability using a movable assembly that rotates the scanning direction of the z-scanner with respect to the sample plane. The movable assembly is moved along a curved guide by a rack-and-pinion drive system and has grooves that engage with corresponding ceramic balls formed on a stationary frame to precisely position the movable assembly at predefined locations along the curved guide. The grooves are urged against the ceramic balls via a spring force and, prior to movement of the movable assembly, a pneumatic force is applied to overcome the spring force and disengage the grooves from the ceramic balls.
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申请公布号 |
US8209766(B2) |
申请公布日期 |
2012.06.26 |
申请号 |
US20100705301 |
申请日期 |
2010.02.12 |
申请人 |
PARK SANG-IL;CHUNG SANG HAN;AHN BYOUNG-WOON;PARK SYSTEMS CORP. |
发明人 |
PARK SANG-IL;CHUNG SANG HAN;AHN BYOUNG-WOON |
分类号 |
H01J37/20 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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