发明名称 Integrated circuit self aligned 3D memory array and manufacturing method
摘要 A 3D memory device includes a plurality of ridge-shaped stacks, in the form of multiple strips of conductive material separated by insulating material, arranged as bit lines which can be coupled through decoding circuits to sense amplifiers. The strips of conductive material have side surfaces on the sides of the ridge-shaped stacks. A plurality of conductive lines arranged as word lines which can be coupled to row decoders, extends orthogonally over the plurality of ridge-shaped stacks. The conductive lines conform to the surface of the stacks. Memory elements lie in a multi-layer array of interface regions at cross-points between side surfaces of the conductive strips on the stacks and the conductive lines. The memory elements are programmable, like the anti-fuses or charge trapping structures. The 3D memory is made using only two critical masks for multiple layers.
申请公布号 US8208279(B2) 申请公布日期 2012.06.26
申请号 US20100692798 申请日期 2010.01.25
申请人 LUE HANG-TING;MACRONIX INTERNATIONAL CO., LTD. 发明人 LUE HANG-TING
分类号 G11C5/06 主分类号 G11C5/06
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