MICROSTRIP TRANSMISSION LINE STRUCTURE AND METHOD FOR MANUFACTURING THE TRANSMISSION LINE STRUCTURE

摘要

PURPOSE: A micro-strip transmission line structure and a manufacturing method thereof are provided to enhance degree of integration by shortening the electrical length of a transmission line and to offer MMIC(Monolithic Microwave Integrated Circuits). CONSTITUTION: An active device or a passive device is formed on a semiconductor substrate. A dielectric layer is formed into silicon nitride based material in order to cover the active device or the passive device. A transmission line is formed at the ceiling surface of the dielectric layer. The transmission line is grounded to via hole.