A METHOD FOR FABRICATING A SENSOR

摘要

PURPOSE: A MEMS(Semiconductor Micro-Electro-Mechanical System) base sensor manufacturing method is provided to efficiently mass produce a small pressure sensor of high sensitivity. CONSTITUTION: A MEMS base sensor manufacturing method is as follows. An interconnection window is formed in the upper part of a first device layer(705). The interconnection unit is arranged in the first device layer(720). A diaphragm cavity is formed in the upper part of a second device layer of a second device wafer(730). The upper part of the first device layer is bonded in the upper part of the second device layer so that a diaphragm is formed on the diaphragm cavity. A first handle layer and a first insulator layer are removed from the first device wafer(740). A sensing element sensing a bending of the diaphragm is arranged in the first device layer(755). A cap is arranged on the diaphragm(765).