| 摘要 |
PURPOSE: A shower head and a vacuum processing apparatus including the same are provided to rapidly repair a shower head plate by equipping a busing member and preventing damage to a spray hole caused by abnormal discharge. CONSTITUTION: A shower head supplies a process gas introduced from the outside to a process space. The shower head includes a shower head plate(131). A plurality of spray holes(132) is formed on the shower head plate. A busing member(136) is installed in the spray hole. A through hole(137) is formed in the busing member.
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