THIN LAYER DEPOSITION APPARATUS

摘要

PURPOSE: An apparatus for depositing a thin film is provided to simultaneously load and unload a cassette as well as open and close a processing chamber by integrating a door and a cassette holder which opens and closes the processing chamber. CONSTITUTION: An opening portion is formed on one side of an external chamber(10). A processing chamber(20) deposits an atomic layer on a substrate by housing a cassette(C). A first door(21) opens and closes the opening portion of the processing chamber. A second door(11) opens and closes the opening portion of the external chamber. A cassette holder(30) loading a plurality of cassettes is located on an inner wall of the first door.