发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME |
摘要 |
<p>PURPOSE: A semiconductor device and a manufacturing method thereof are provided to obtain the reliability of a device by forming a P-type dipole capping layer in a PMOS(P-channel Metal Oxide Semiconductor) area. CONSTITUTION: A gate insulating layer(12) is formed on a substrate(10). Dipole capping layers(13A,13B) are formed on the gate insulating layer. A metal gate film(15A) and a polysilicon layer are laminated on the dipole capping layer. The polysilicon layer, the metal gate film, the dipole capping layer, and the gate insulating layer are etched and a gate pattern is formed. A gate spacer(18) is formed on a sidewall of the gate pattern.</p> |
申请公布号 |
KR20120066955(A) |
申请公布日期 |
2012.06.25 |
申请号 |
KR20100128321 |
申请日期 |
2010.12.15 |
申请人 |
SK HYNIX INC. |
发明人 |
PARK, WOO YOUNG;LEE, KEE JEUNG;KIM, TAE YOON;JI, YUN HYUCK |
分类号 |
H01L21/336;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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