发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 <p>PURPOSE: A semiconductor device and a manufacturing method thereof are provided to obtain the reliability of a device by forming a P-type dipole capping layer in a PMOS(P-channel Metal Oxide Semiconductor) area. CONSTITUTION: A gate insulating layer(12) is formed on a substrate(10). Dipole capping layers(13A,13B) are formed on the gate insulating layer. A metal gate film(15A) and a polysilicon layer are laminated on the dipole capping layer. The polysilicon layer, the metal gate film, the dipole capping layer, and the gate insulating layer are etched and a gate pattern is formed. A gate spacer(18) is formed on a sidewall of the gate pattern.</p>
申请公布号 KR20120066955(A) 申请公布日期 2012.06.25
申请号 KR20100128321 申请日期 2010.12.15
申请人 SK HYNIX INC. 发明人 PARK, WOO YOUNG;LEE, KEE JEUNG;KIM, TAE YOON;JI, YUN HYUCK
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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