| 摘要 |
PURPOSE: A substrate laminating apparatus is provided to easily arrange an upper chamber and a lower chamber and to prevent foreign material due to arrangement. CONSTITUTION: A chamber lifting unit(300) lifts an upper chamber. The chamber lifting unit separates the upper chamber to the lower chamber. The chamber lifting unit forms laminating space. An arranging unit(310) is included outside the lower chamber and the upper chamber. The arranging unit arranges the upper chamber and the lower chamber. |
