发明名称 FRONT OPENING WAFER CONTAINER WITH ROBOTIC FLANGE
摘要 A front opening wafer container suitable, for large diameter wafers, 300 mm and above, utilizes a removable robotic flange that attaches vertically, without separate fasteners, using detents having resilient bending members that extend vertically to attach to an upwardly extending flange on the top wall of the container portion. A multiplicity of upwardly and outwardly extending strengthening ribs extend upwardly from the top wall of the container portion and extend along the top wall toward the left and right sides and the back side of the container portion, ad each of all four sides of the attachment flange. A further locking piece or core may be inserted and retained at the neck of the robotic flange to lock the resilient deflectable portions in their retention position. The locking piece further may be secured in place with a detent mechanism formed by part of the core and flanges.
申请公布号 WO2012054625(A3) 申请公布日期 2012.06.21
申请号 WO2011US56915 申请日期 2011.10.19
申请人 ENTEGRIS, INC.;GREGERSON, BARRY 发明人 GREGERSON, BARRY
分类号 H01L21/673 主分类号 H01L21/673
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