| 摘要 |
A spatial light modulator drive method comprises: setting first-state mirror elements, in an array of mirror elements, that are configured to render, incident light into reflected light with the same phase or a phase differing by a first phase, and second-state mirror elements, in the array of mirror elements, that are configured to render the incident light into reflected light with a phase differing from the first phase by substantially 180°, in an arrangement having a first phase distribution; and setting the first-state mirror elements and the second-state mirror elements in the array of mirror elements in an arrangement having a second phase distribution inverted from the first phase distribution. When a spatial light modulator having an array of a plurality of optical elements is used, the method can reduce an error of an intensity distribution of a spatial image eventually formed on a substrate surface from a target distribution. |
