| 摘要 |
Disclosed are a vapor deposition shadow mask system for backplane and display screen of any size and a method thereof. The system comprises at least one vacuum chamber, a substrate and a transmission device. M groups of shadow masks and deposition sources are positioned in each vacuum chamber. The substrate has M basic units and each unit is uniformly divided into N areas. The transmission device is used for translating the substrate or the shadow masks along a path of vacuum chamber so as to make M groups of shadow masks corresponding to different areas of M basic units in N different time. Wherein, M is a natural number of no less than 1 and N is a natural number of no less than 2. |
