| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an wurtzite piezoelectric thin film which has any other orientations than a vertical orientation type and a parallel orientation type, and in which characteristics which are absent in the prior arts, can be obtained by the orientation. <P>SOLUTION: A thin film comprised of a material having an wurtzite crystal structure is provided, in which the tilting angle that is formed from a normal and a c-axis, with respect to the thin film, is larger than the critical tilting angle with which a piezoelectric constant e<SB POS="POST">33</SB>for longitudinal waves become zero, and smaller than 90°. The thin film can be used for a thin film resonator having a property, which is absent in the prior arts, in which longitudinal wave vibrations of a phase inverse to the wurtzite crystal thin film of vertical orientation occur. The thin film can be manufactured by irradiating a surface of a substrate S with ion beams IB so as to be incident at an angle α which exceeds 10° and smaller than or equal to 40°, while depositing a material M having the wurtzite crystal structure on the surface of the substrate S. <P>COPYRIGHT: (C)2012,JPO&INPIT |
