| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase a capacitance value of a variable capacitor in the variable capacitor and a manufacturing method thereof. <P>SOLUTION: A manufacturing method of a variable capacitor 100 comprises: a step of forming an opening 9a on a second sacrificial film 9 in etching for masking a first resist pattern 11; a step of forming a second dielectric film 13 and a capacitor electrode 14 in this order in the opening 9a and on the first resist pattern 11; a step of leaving the second dielectric film 13 and the capacitor electrode 14 in the opening 9a by removing the first resist pattern 11; a step of forming a third sacrificial film 17 on the second sacrificial film 9 and the capacitor electrode 14; a step of forming a projection resistance 21a in a recess 17x of a top face 17b of the third sacrificial film 17; a step of forming a movable upper electrode 25 on the third sacrificial film 17 and the projection resistance 21a; and a step of removing the second sacrificial film 9 and the third sacrificial film 17 after forming the movable upper electrode 25. <P>COPYRIGHT: (C)2012,JPO&INPIT |
