| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro-oscillation element which is suitable for adjusting a natural frequency related to the oscillation of an oscillation part. <P>SOLUTION: The micro-oscillation element X2 includes an oscillation part 210, a frame 220, and a connection part 230 that connects the oscillation part to the frame and prescribes an oscillation axis A2. The connection part includes a plurality of torsion bars 231, 232, 233 that juxtapose to each other. Two torsion bars selected from the plurality of the torsion bars can relatively come close to each other and move away from each other. The oscillation part includes an oscillating main part 211 and first movable parts 212A, 212B that are mounted on the oscillating main part 211 and can be shifted in a direction that crosses the oscillation axis. The frame includes a frame main part and second movable parts 223A, 223B that are mounted on the frame main part can be shifted in the same direction as the first movable parts 212A, 212B. One of the torsion bars 232, 233 included in the connection part connects the first and second movable parts. <P>COPYRIGHT: (C)2012,JPO&INPIT |
