| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card adhering unit capable of certainly carrying out the locking/unlocking action of a probe card. <P>SOLUTION: A probe card adhering unit for adhering a probe card 200 equipped with a clamp head 210 having a tapered surface to a reference member, comprises an arm portion 112 equipped with a rotating mechanism 113 at a tip end; and a driving portion 111 for moving the arm portion 112 to the reference member so as to make the rotating mechanism 113 of the arm portion 112 take a position contacting with the tapered surface of the clamp head 210 and a position separating from the tapered surface of the clamp head 210. <P>COPYRIGHT: (C)2012,JPO&INPIT |
