| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a physical quantity sensor in which air damping effect is reduced while maintaining high sensitivity. <P>SOLUTION: An acceleration sensor includes a movable electrode 4 that moves in response to a physical quantity applied from the outside, an upper fixing plate 2a arranged facing the upper surface of the movable electrode 4, and a lower fixing plate 2b arranged facing the under surface of the movable electrode 4. A gap width B between the movable electrode 4 and the lower fixing plate 2b is larger than a gap width A between the movable electrode 4 and the upper fixing plate 2a. <P>COPYRIGHT: (C)2012,JPO&INPIT |
