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发明名称
Procédé de production de structures cristallines
摘要
申请公布号
FR1382185(A)
申请公布日期
1964.12.18
申请号
FR19630949547
申请日期
1963.10.04
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
分类号
C23C16/04;H01L21/00
主分类号
C23C16/04
代理机构
代理人
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