发明名称 |
MAGNETRON ARRANGEMENT WITH A HOLLOW TARGET |
摘要 |
A magnetron arrangement includes a hollow target and a magnet system arranged in the hollow target with a magnet carrier and a magnet arrangement fitted on the magnet carrier. The magnet carrier includes at least two magnet carrier elements, which each have at least one cavity and each have at least one contact face on an outer side. The at least two magnet carrier elements are in touching contact with their contact faces and are fixedly connected to one another, and the cavities of the magnet carrier elements have no connection between them. |
申请公布号 |
US2012152738(A1) |
申请公布日期 |
2012.06.21 |
申请号 |
US201113332601 |
申请日期 |
2011.12.21 |
申请人 |
HEINRICH HANS-JUERGEN;GRUNE HARALD;RANK ROLF;VON ARDENNE ANLAGENTECHNIK GMBH |
发明人 |
HEINRICH HANS-JUERGEN;GRUNE HARALD;RANK ROLF |
分类号 |
C23C14/35 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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